X-ray fluorescence analyzer

  • Inventors: NOMA TAKASHI
  • Assignees: Canon Inc
  • Publication Date: February 05, 1992
  • Publication Number: JP-H0434349-A

Abstract

PURPOSE: To increase the intensity of fluorescence X-rays excited in a sample and to shorten a time for measurement by using as a sample support an X-ray target containing an element which radiates characteristic X-rays exciting selectively an element to be analyzed in the sample. CONSTITUTION: A sample 1 to be analyzed is set directly on an X-ray target 2. Accordingly, the X-ray target 2 serves also as a sample support. The X-ray target 2 contains an element which radiates characteristic X-rays being suitable for exciting selectively an element to be analyzed in a sample 1. Primary X-rays 4 from an X-ray source 3 are applied to the sample 1 and the X-ray target 2. The characteristic X-rays 5 radiated from the X-ray target 2 excite selectively the element to be analyzed in the sample 1. Fluorescence X-rays 6 generated in the sample 1 are detected by a detector 7. A signal from the detector 7 is sent to a signal processing device 8 and recorded and and analyzed. COPYRIGHT: (C)1992,JPO&Japio

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    JP-2007225469-ASeptember 06, 2007Sii Nanotechnology Inc, エスアイアイ・ナノテクノロジー株式会社Fluorescent x-ray analyzer
    KR-101109050-B1February 29, 2012주식회사 아이에스피Contactless thickness gauge using fluorescence x-rays