PURPOSE: To increase the intensity of fluorescence X-rays excited in a sample and to shorten a time for measurement by using as a sample support an X-ray target containing an element which radiates characteristic X-rays exciting selectively an element to be analyzed in the sample.
CONSTITUTION: A sample 1 to be analyzed is set directly on an X-ray target 2. Accordingly, the X-ray target 2 serves also as a sample support. The X-ray target 2 contains an element which radiates characteristic X-rays being suitable for exciting selectively an element to be analyzed in a sample 1. Primary X-rays 4 from an X-ray source 3 are applied to the sample 1 and the X-ray target 2. The characteristic X-rays 5 radiated from the X-ray target 2 excite selectively the element to be analyzed in the sample 1. Fluorescence X-rays 6 generated in the sample 1 are detected by a detector 7. A signal from the detector 7 is sent to a signal processing device 8 and recorded and and analyzed.